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TEGAL receives silicon drie tool order from Uppsala University

Wed, 05/19/2010 - 2:37am
I-Micronews

Tegal Corporation, (Nasdaq: TGAL) an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices, today announced it has received an order for a Tegal 110 S/DE DRIE tool from Uppsala University. The Tegal 110 S/DE DRIE tool will be installed in the Uppsala University Ångström Microstructure Laboratory, located in Uppsala, Sweden. The Ångström Laboratory constitutes one of Europe’s most advanced laboratories for materials science, and is the largest university clean room in the Nordic countries.

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