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SPTS Ships 300mm Sigma® fxPTM PVD System and RVP300 Vertical Furnace to STATS ChipPAC for eWLB Production

Tue, 06/29/2010 - 10:39am
I-Micronews

SPP Process Technology Systems (SPTS), a supplier of advanced capital equipment and process technologies for the global semiconductor industry and related markets, today announced that it has shipped a 300mm Sigma® fxPTM PVD system and a 300mm RVP300 furnace to STATS ChipPAC, a leading service provider of semiconductor packaging design, bump, probe, assembly, test and distribution solutions. 

About SPP Process Technology Systems

SPP Process Technology Systems was established in October 2009 as the vehicle for the merger of Surface Technology Systems and Aviza Technology.  The company is a wholly-owned subsidiary of Sumitomo Precision Products Co., Ltd, and designs, manufactures, sells, and supports advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets.  These products are used in a variety of market segments, including data storage, MEMS and nanotechnology, advanced 3-D packaging, and power integrated circuits for communications.

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