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Tegal receives order for Tegal 200 SE silicon DRIE process tool from Fraunhofer Institute for microelectronic circuits and systems(2)

Fri, 01/14/2011 - 10:43am
I-Micronews

Tegal Corporation, (Nasdaq: TGAL) an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices, today announced it has received an order from the Fraunhofer Institute for Microelectronic Circuits and Systems in Duisburg, Germany for a Tegal 200 SE™ DRIE system equipped with the new Tegal ProNova2™ reactor. The Tegal 200 SE DRIE system will be shipped and installed at the customer’s site in early CY2011, and will support Fraunhofer IMS’ mission to develop and produce microelectronic system solutions by combining mixed-signal ICs and integrated microsystems (MEMS) devices built using a state-of-the-art equipment set and “more than Moore” thinking.

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