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World?s first diamond nanoelectromechanical switch

Sat, 01/08/2011 - 1:35am
I-Micronews

Dr. Meiyong Liao, a Senior Researcher of Sensor Materials Center, National Institute for Materials Science, cooperated with his colleagues, succeeded in the batch fabrication of suspended structures (cantilevers and bridges) of single crystal diamond for nano/micro electromechanical systems (NEMS/MEMS). Based on this process, they achieved in the world the first single crystal diamond NEMS switch.

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