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ADI ups ante in high-precision MEMS gyros

Tue, 03/01/2011 - 10:38am
I-Micronews

(ADI) has upped the ante for high-precision with its invention of quad-differential iMEMS gyros, which combine four separate sensing elements to cancel out the effects of vibration, noise and other environmental stimuli.

MEMS gyroscopes use a vibrating "proof mass" suspended on silicon springs which harnesses the Coriolis effect to detect rotation orthogonal to its motion with capacitive sensors around its edges. Unfortunately, vibration, shock and excessive linear acceleration can fool a single proof mass into falsely reporting rotational motion. To cancel out these effects, ADI already had dual-differential proof masses on its previous high-precision gyros, but now has taken a significant step forward by going quad.

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