Ultralow-power readout architecture for MEMS/NEMS sensors(2)
The system can read both accelerometers and strain sensors in a half-bridge configuration. The gain is controlled by integrating pulses from the excitation voltage allowing accurate control of the SNR (signal-to-noise) ratio. We achieved a figure-of-merit of 4.41×10-20 F√(W/Hz) for a sensor range of ±2.0g and ±20,000με over a 100Hz bandwidth. The system has also been designed to cancel residual motion artifacts.