Microstructure Motion Analyzer
This tool is offered for precise 3D dynamic characterization of microelectromechanical systems (MEMS) and micro-optoelectromechanical (MOEMS) microstructures. A fully integrated, probe head microscope, the MSA-400 Micro System Analyzer can completely measure and display microstructure motions, simplifying identification of microstructural resonances in all three dimensions. The combination tool is designed to quickly characterize broadband out-of-plane vibrations with laser doppler vibrometry (max. 20 MHz, sub-pm resolution) and in-plane displacements with stroboscopic video microscopy (max. 2 MHz, nm resolution).