MDT Exclusive: Control Valve

The MEMS (micro-electro-mechanical-systems) valve uses electrostatic force to direct the flow of inert gases. It offers clean service by eliminating solenoids, spools, springs, and internal seals. On-board electronics provides “last command” control, a consistent response time of less than 1 mS, low power consumption (0.02 watt), long cycle life, and one-size-fits-all modular design.

Models are available with two, three, and five ports; flow to 2.7 scfm (76 l/m); and vacuum pressure to 100 psig.