Linear Air-Bearing Stage
Leading edge manufacturing demands positioning tolerances beyond the capability of conventional ball-screw and mechanical-bearing positioning systems. The ABL1500, with its fully active preload, exceptionally high stiffness, and excellent geometric characteristics, was designed specifically to meet the needs of the most demanding applications. It incorporates an active preload on both the vertical and horizontal surfaces, and the opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.