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Microstructure Motion Analyzer

Tue, 05/03/2005 - 8:23am

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This tool is offered for precise 3D dynamic characterization of microelectromechanical systems (MEMS) and micro-optoelectromechanical (MOEMS) microstructures. A fully integrated, probe head microscope, the MSA-400 Micro System Analyzer can completely measure and display microstructure motions, simplifying identification of microstructural resonances in all three dimensions. The combination tool is designed to quickly characterize broadband out-of-plane vibrations with laser doppler vibrometry (max. 20 MHz, sub-pm resolution) and in-plane displacements with stroboscopic video microscopy (max. 2 MHz, nm resolution).

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