The Microtech MBD2 beam delivery system is designed for UV excimer lasers. It is an industrial-grade, large format system that is for 24/7 production in an industrial environment. It accommodates large-format beam delivery system modules. It is especially useful for users who have optical tables, lasers, and motion controls and need a comprehensive mask imaging system. The MBD2 can operate at short UV wavelengths and is designed to be compatible with larger mirrors, optics, beam homogenizers, spacers, mounts, and other beam delivery system components such as variable attenuators and dual camera systems.