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Gas Plasma System (3609)

Tue, 12/05/2006 - 12:21pm

This low pressure gas plasma system is for thin film coating and surface modification of medical components. The cleanroom-compatible AL140 plasma system has a 850 x 450 x 350 mm aluminum chamber. Designed for production processing, the system has a unique drawer style door with a drop-down front for easy access to the entire chamber for ease of cleaning. The self-contained PLC touch screen process controller requires no external PC and includes error monitoring, recipe storage, and process data downloading capability. Standard system configuration includes gas introduction via mass flow controllers and magnetic valves to ensure precise gas measurement.

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