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Air-Bearing Stage

Fri, 08/10/2007 - 5:11am


The ABRT series rotary air-bearing stages provide 360° continuous travel with resolution to 0.027 arc sec. Velocity stability and error motion performance are exceptional. Payload capacity is up to 69 kg due to the outstanding radial and axial stiffness. The ABRT design features large air-bearing surfaces and innovative preloading for high stiffness and load capacity, producing not only excellent axial and radial error motions (asynchronous is <20 nm for each), but outstanding tilt error motion (asynchronous is <0.04 arc sec), as well.
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