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Deep-UV Optical Coating

Fri, 02/15/2008 - 10:10am


A deep-UV optical coating offers long-lifetime optics that address the growing need for highly accurate and reliable beam delivery in leading-edge medical and semiconductor photolithography systems. The proprietary high-throughput UV coatings increase component lifetime while minimizing compaction, thereby extending the time between maintenance cycles and reducing system down time. Reflectivity and damage-threshold testing have been successfully completed, and in independent tests, the company has qualified multiple coating chambers, thus ensuring product availability.
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