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Direct-Drive Linear Stage Offers Nanometer Accuracy

Mon, 10/05/2009 - 6:19am

The ANT130-L series stages offer excellent performance in speed, accuracy, resolution, repeatability, reliability, and travel range, and are offered in two accuracy grades. The stage employs a center-driven, non-cogging, non-contact linear motor and encoder as the driving element. Since the linear motor is a direct-drive device, there is no backlash, windup, or "stiction" normally associated with a lead- or ball-screw drive. The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ANT130-L to a peak unloaded acceleration of 1 g and a maximum velocity of 350 mm/s.


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