Inspection Station Is an Automated Platform
Fri, 09/24/2010 - 5:45am
The LF210 Inspection Station by Prior Scientific is an automated inspection platform suitable for most industrial samples with moderate to high reflectivity. Samples placed on the Inspection Station’s motorized stage may be inspected manually using the ProScan joystick or automatically inspected using one of many imaging software packages commercially available. The heart of the LF210 inspection station is Prior’s LF210 Laser Autofocus module. The module combines the latest in intelligent microprocessor control and advanced optics to provide the fastest and most reliable real time laser autofocus available. Ideally suited for reflective specimens, the optical design eliminates the need to manually adjust the focus trim and loop gain (which is done automatically in the processor), resulting in a dramatic improvement in throughput. The intelligent digital control automatically senses when the sample has moved out of the field of view and stops the focus drive, while LEDs give a clear presentation of the focus status. Combined with the LF100K digipot/keypad, the LF210 provides a microstepping drive for the Inspection Station’s focus motor. The Inspection Station comes standard with Prior’s high precision motorized XY stage with 40 nanometer resolution; Mitutoyo VMU assembly with four position nosepiece; 10X, 20X, 50X, and 100X objectives; and a powerful 150-watt fiber-optic illuminator. Wafer chucks and mask holders are available as well as custom holders. Software included with the system includes the ability to create simple patterns and to jog the system in X and Y. An SDK is provided for those users who want to implement the Prior controls within existing software. The entire system is compatible with most existing image analysis software packages.