Linear Stage Features Sub-micron Positioning and High Acceleration
Equipment Solutions’ Series of VCS-10 Voice Coil Stages feature: Sub-micron positioning, high acceleration, digital and/or analog position sensors, and are available with a 10 mm clear aperture. These high acceleration stages (50 G's no load), have 10 mm of linear motion and < 3 millisecond step response time. The customizable VCS-10 Series of linear position stages are ideal for high speed, high precision optical and laser focusing applications in: Medical, semiconductor inspection and manufacturing, scanning microscopy, and micro machining/manufacturing.
The VCS-1010D linear position stage (pictured) features a 10 mm clear aperture and a 1 μm resolution digital position sensor, with differential quadrature outputs and a center index pulse. The highly responsive, frictionless voice coil motor has been optimized to keep the moving mass as low as possible for the fastest response times, and it has the lowest electrical noise of any motor type.
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