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Linear Piezo Nanopositioners

Tue, 08/19/2014 - 2:55pm
MDT Staff

Aerotech’s QNP-L series linear piezo nanopositioning stages give nanometer-level performance in a compact, high-stiffness package. A variety of travel and feedback options make these stages ideal for applications ranging from microscopy to optics alignment.

The QNP-L linear piezo stages are guided by precision flexures optimized using finite element analysis to ensure high-stiffness and long life. This design offers stiffness and resonant frequency for high process throughput and fast closed-loop response. The design also provides strong geometric performance (straightness and angular errors) while minimizing overall stage package size.

All QNP-L piezo stages offer closed-loop feedback using a unique capacitive sensor design that yields sub-nanometer positioning resolution and high-positioning accuracy (linearity). The capacitive sensors directly measure the output of the positioning carriage, enabling linearity and positioning repeatability.

When coupled with Aerotech’s Q-series controllers and drives, QNP-L piezo nanopositioning stages demonstrate sub-nanometer positioning resolution and in-position stability (jitter), and high-positioning bandwidth. Aerotech’s Dynamic Controls Toolbox and Motion Designer software packages provide a host of advanced yet easy-to-use tools such as Learning Control, Harmonic Cancellation, and Command Shaping, providing improved tracking errors and faster step-and-settle times.

Aerotech’s QNP-L piezo stages are available with capacitive sensor feedback or without feedback (open-loop). An optional mounting plate provides direct mounting to English or metric breadboard optical tables. Common travels of the X, XY, and Z stages mount together without adapter plates. All QNP piezo stages are available in vacuum-prepared versions upon request.

 

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