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This system is designed for precise 3D dynamic characterization of microelectromechanical systems (MEMS) and micro-optoelectromechanical (MOEMS) microstructures. A fully integrated, probe head microscope, the MSA-400 Micro System Analyzer can completely measure and display microstructure motions, simplifying identification of microstructural resonances in all three dimensions. The combination tool is designed to quickly characterize broadband out-of-plane vibrations with laser doppler vibrometry and in-plane displacements with stroboscopic video microscopy. An optional second laser is available for measuring differential out-of-plane vibrations between scanned and fixed locations.

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