Utilizing white light interferometry in a compact design, the MarSurf WS 1 optical surface metrology system offers vertical resolution of 0.1 nm and provides 3D measurement in only a few seconds. Utilizing MarSurf XT 20 topographical evaluation software, the space-saving system can be configured to work both in the lab and on the shop floor. The white light optical sensor in the MarSurf WS 1 enables the rapid, high-precision recording of surface topography on a wide range of materials. Using white light and a CCD camera, the system is able to collect height information through the field of view of the camera. Both the test surface area and a high-precision reference surface built into the objective lens are imaged simultaneously by the camera.