Ideal applications include optics positioning, z-axis positioning of sensors in surface metrology, and in general purpose high-precision alignment. Quick and straightforward multi-axis configurations are made easily with other MPS linear and rotary stages using the adapter brackets and mounting compatibility inherent in the entire MPS stage family.
The precision ground, preloaded ball-screw coupled with a low thermal expansion linear encoder provides outstanding accuracy, repeatability and a positioning resolution capability to 25 nm. Anti-creep, crossed-roller bearings provide exceptionally smooth travel and high-load capacity in a compact package. The low thermal expansion (3.3 ppm/˚C) precision glass scale encoder results in high-accuracy and repeatable positioning over long periods of time. The linear encoder is available with amplified sine (1 Vpp) or 50 nm TTL digital outputs for easy integration with all standard controllers.
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